@Article{BragaMDSCPMO:2016:EfThAn,
author = "Braga, T. S. and Massi, M. and Duarte, D. A. and Silva Sobrinho,
A. S. and Cardoso, G. W. Alves and Pereira, F. P. and Machado,
Jo{\~a}o Paulo Barros and Otani, C.",
affiliation = "{Instituto Tecnol{\'o}gico de Aeron{\'a}utica (ITA)} and
{Instituto Tecnol{\'o}gico de Aeron{\'a}utica (ITA)} and
{Instituto Tecnol{\'o}gico de Aeron{\'a}utica (ITA)} and
{Instituto Tecnol{\'o}gico de Aeron{\'a}utica (ITA)} and
{Instituto Tecnol{\'o}gico de Aeron{\'a}utica (ITA)} and
{Instituto Tecnol{\'o}gico de Aeron{\'a}utica (ITA)} and
{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Tecnol{\'o}gico de Aeron{\'a}utica (ITA)}",
title = "Effect of the thermal annealing on the properties of RF sputtered
Mo-AlNxOy composite thin films",
journal = "Vacuum",
year = "2016",
volume = "129",
pages = "115--121",
month = "July",
keywords = "Magnetron sputtering, Mo-AlNxOy, Thermal annealing, Thin films.",
abstract = "In the last few years, the concentrating solar power (CSP) systems
have been studied and growing surprisingly in several countries.
The science and technology involved to manufacture the special
materials for these devices has been a determining factor for the
system performance. Among these special materials, ceramic-metal
composite (cermet) is an important class largely used as a main
absorber in the selective surfaces of evacuated tube collectors.
This work aims to manufacture Mo-AlNxOy thin films by magnetron
sputtering technique. The parameter studied was the effect of
annealing temperature (600C-1100 °C) on the optical properties and
surface morphology of the films. The results showed that the
annealing (800-1100 °C) increase the absorptance, produces an
oxidation in the bulk of the films and a breakage in the AlN
surface bonds, reducing the initial quantity of nitrogen. It is
noteworthy that the annealing at 600 °C did not alter the optical
and morphology properties of the films, suggesting that the films
of Mo-AlNxOy produced can be applied in selective surfaces in the
future.",
doi = "10.1016/j.vacuum.2016.04.024",
url = "http://dx.doi.org/10.1016/j.vacuum.2016.04.024",
issn = "0042-207X",
language = "en",
targetfile = "braga_effect.pdf",
urlaccessdate = "28 abr. 2024"
}